UNIVERSITY of WASHINGTON | BOTHELL

Electrical Engineering | Science & Technology

 


UW Bothell Microfabrication Facility

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

This facility is housed in the UWBB 226.

This room will be well equipped with most standard microfabrication tools.

Modular Cleanroom (class 1000) (10'L x 8'W x 8'H)

Lithogrophy: UV exposure with aligner.

Fumehood with a sink.

Metalization: Thermal evaporator.

Hotplate, Oven

Spinner

 

 

 

 

 

 

Copyright © Seungkeun Choi 2012
Email: schoi [at] uwb.edu