Course Description: the course covers principles and techniques for the fabrication of microelectronics devices and integrated circuits. Includes clean room laboratory practices and chemical safety, photolithography, wet and dry etching, oxidation and diffusion, metallization and dielectric deposition, compressed gas systems, vacuum systems, thermal processing systems, plasma systems, and metrology.
Course Goals: To introduce and train students in safe, controlled, and scientific laboratory techniques which are used in the microelectronics field.