MONDAY WEDNESDAY FRIDAY
  01/06 01/08 01/10

WEEK 1

Lecture 1

Course introduction

Lab safety

Lecture 2

Course introduction, 1.1, 1.3

Lecture 3

1.2
  01/13 01/15 01/17

WEEK 2

Lecture 4

1.2, 1.4, 1.5, 1.7, 2.1

Lecture 5

2.1, 2.2, 2.4, 2.5, 4.1

Lecture 6

4.2, 4.3

Quiz #1
  01/20 01/22 01/24

WEEK 3

 Holiday

Lecture 7

4.4, 5.1, 5.2

Lecture 8

5.2
  01/27 01/29 01/31

WEEK 4

Lecture 9

5.2

Lecture 10

5.3

Lecture 11

5.4, 5.5

Quiz #2
  02/03 02/05 02/07

WEEK 5

Lecture 12

6.1-3

Lecture 13

6.3, 8.1-4

Lecture 14

8.4
  02/10 02/12 02/14

WEEK 6

Lecture 15

8.4, 9.1

Lecture 16

9.1

Lecture 17

imaging and exposure

Quiz #3
  02/17 02/19 02/21

WEEK 7

 Holiday

Lecture 18

imaging and exposure; photoresist

Lecture 19

photoresist
  02/24 02/26 02/28

WEEK 8

Lecture 20

11.1, 11.4

SOP Report due

Lecture 21

11.4

Lecture 22

11.4

Quiz #4
  03/03 03/05 03/07

WEEK 9

Lecture 23

11.3, anisotropic wet etching

Lecture 24

anisotropic wet etching, isotropic dry etching

Lecture 25

RIE, DRIE
  03/10 03/12 03/14

WEEK 10

Lecture 26

Thermal oxidation, vacuum pumps

Lecture 27

vacuum pumps
Quiz #5