Picture for: Continuous or batch? /
How do you make a microreactor?
(Note: source has © on the figure)
Here's a diagram of the Penn State polystyrene batch reactor, and how it is made. "A" is the profile after chemical etching was used to remove photoresist destroyed by UV. "B" is after silicon nitride removal using CF4 plasma etch and photoresist removal using O2 plasma. "C" is after KOH etching of the silicon; there are now rows of flat-topped pyramids on top of the wafer. "D" shows the use of the wafer to hot press mold a polystyrene sheet. "E" is the finished sheet of microreactors, with a volume as low as 0.4 picoliter each. "F" is one of these.
Source: Clark RA, Hietpas PB, Ewing AG. January 15, 1997. Analytical Chemistry. Vol. 69, No. 2, 259-263.