Department of Physics
University of Washington
Seattle, WA 98195-1560

Lab: Phys/Astr B308
Tel: (206) 543 0435
Fax: (206) 616 2774

Nanotube chemical vapor growth

Nanowire physical vapor deposition

Fume hood

Electrical probestation

DI Dimension 3100, which allows linear, drift-free tip positioning

To use the AFM, contact Jiang Wei

He-4 and He-3 inserts for an 18 T superconducting magnet dewar

4K cryocooler (on order)

Optical microscopes

Zeiss Axiovert with 3.4 mm WD at 100x, home-built probing and thermal stage

Other microscopes

Wire bonder

Westbond 545657E-79 wedge/ball bonder.
This is a shared facility

To use the bonder, contact Zenghui Wang

Vacuum/microprobe chamber with -40 to +80 C operation

Other resources we use at UW

- FEI Syrion SEM in the Nanotech Center, for electron-beam imaging and lithography

- TEM in the Nanotech Center

- Atomic layer deposition in the Nanotech Center

- Thermal evaporators in Chemistry
- Electron-beam evaporator in Physics Processing Lab

- Optical lithography and etching in the Nanotech Center
- Laser micromachining tool in EE
- Pocessing facilities in WTC

- Sputterer for metals in MSE

Poor man's lithography

Shadow mask preparation kit